Polishing estimation/evaluation device, overpolishing condition calculation device, and computer-readable non-transitory medium thereof

An overpolishing condition calculation device comprising:na test pattern obtaining unit that obtains a layout of a test pattern in which a plurality of areas having different wiring densities are arranged at different intervals;a polishing result obtaining unit that obtains a result of polishing the test pattern; anda condition calculating unit that obtains a relation between a wiring density in an area where overpolishing occurs and a wiring density in surrounding areas of the area as an overpolishing condition based on the layout of the test pattern and the result of polishing, whereinan upper portion of the test pattern for determining the overpolishing condition is arranged in a manner that areas having a wiring density of 100% are arranged in an area having a wiring density of 0% at different intervals,the interval between the areas having a wiring density of 100% becomes smaller toward the left so that areas having a wiring density of 100% in the vicinity are surrounding areas and a difference in the wiring density is small so as to suppress occurrence of Edge Over Erosion (EOE), andthe interval between the areas having the wiring density of 100% becomes larger toward the right so that the areas having the wiring density of 100% in the vicinity are not included in the surrounding areas and the difference in the wiring density is large so as to accelerate the occurrence of the Edge Over Erosion (EOE).

An overpolishing condition calculation device comprising:na processor configured to execute a procedure, the procedure comprising:nobtaining a layout of a test pattern in which a plurality of areas having different wiring densities are arranged at different intervals;obtaining a result of polishing the test pattern; andobtaining a relation between a wiring density in an area where overpolishing occurs and a wiring density in surrounding areas of the area as an overpolishing condition based on the layout of the test pattern and the result of polishing, whereinan upper portion of the test pattern for determining the overpolishinq condition is arranged in a manner that areas having a wiring density of 100% are arranged in an area having a wiring density of 0% at different intervals,the interval between the areas having a wiring density of 100% becomes smaller toward the left so that areas having a wiring density of 100% in the vicinity are surrounding areas and a difference in the wiring density is small so as to suppress occurrence of Edge Over Erosion (EOE), andthe interval between the areas having the wiring density of 100% becomes larger toward the right so that the areas having the wiring density of 100% in the vicinity are not included in the surrounding areas and the difference in the wiring density is large so as to accelerate the occurrence of the Edge Over Erosion (EOE).

A computer-readable, non-transitory medium stored therein an overpolishing condition calculation program, the program causing a computer to execute a procedure, the procedure comprising:nobtaining a layout of a test pattern in which a plurality of areas having different wiring densities are arranged at different intervals;obtaining a result of polishing the test pattern; andobtaining a relation between a wiring density in an area where overpolishing occurs and a wiring density in surrounding areas of the area as an overpolishing condition based on the layout of the test pattern and the result of polishing, whereinan upper portion of the test pattern for determining the overpolishing condition is arranged in a manner that areas having a wiring density of 100% are arranged in an area having a wiring density of 0% at different intervals,the interval between the areas having a wiring density of 100% becomes smaller toward the left so that areas having a wiring density of 100% in the vicinity are surrounding areas and a difference in the wiring density is small so as to suppress occurrence of Edge Over Erosion (EOE), andthe interval between the areas having the wiring density of 100% becomes larger toward the right so that the areas having the wiring density of 100% in the vicinity are not included in the surrounding areas and the difference in the wiring density is large so as to accelerate the occurrence of the Edge Over Erosion (EOE).