A semiconductor display device is formed including an interlayer insulating. Specifically, a TFT is formed and then a nitrogen-containing inorganic insulating film that transmits less moisture compared to organic resin film is formed so as to cover the TFT. Next, organic resin including photosensitive acrylic resin is applied and an opening is formed by partially exposing the organic resin film to light. The organic resin film where the opening is formed, is then covered with a nitrogen-containing inorganic insulating film which transmits less moisture than organic resin film does. Thereafter, the gate insulating film and the two layers of the nitrogen-containing inorganic insulating films are partially etched away in the opening of the organic resin film to expose the active layer of the TFT.

Claims

20 · 4 independent · depth 4

20 granted claims

›1.independentA semiconductor device comprising:na first insulating film including a first hole;a second insulating film over the first insulating film, the second …+4

›6.independentA semiconductor device comprising:na first insulating film including a first hole;a second insulating film over the first insulating film, the second …+4

›11.independentA semiconductor device comprising:na thin film transistor;a first insulating film over the thin film transistor, the first insulating film including a…+3

›15.independentA semiconductor device comprising:na thin film transistor;a first insulating film over the thin film transistor, the first insulating film including a…+5

Classifications

25 codes

IPC · International Patent Classification

Section H — Electricity

H01L23/48
H01L31/112
H01L31/113
H01L29/15
H01L29/04
H01L29/76
H01L23/52
H01L29/10
H01L29/40
H01L31/20
H01L31/036
H01L31/0376
H01L31/062

USPC · US Patent Classification

257/72257/57257/E29.273257/775257/774257/E29.202257/59257/66257/E29.137257/E29.117257/E29.151257/291

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Pendency

1.6 y

568 days filing → grant

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after a restriction

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1 RCE

Examiner

Ida M Soward

art unit 2822 · TC 2800

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1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20120205658 A1	16 Aug 2012

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