US Patent 6,101,740 — Method and apparatus for transporting articles

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Abstract

In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of the first vessel (10) is closed and sealed against a door seal (24). The first vessel (10) is then purged with nitrogen to expel moisture and reactive gases from the interior of the first vessel (10). After purging, the first vessel (10) is then placed within the second vessel (90). The door (102) of the second vessel (90) is then closed and sealed against a door seal (104). The second vessel (90) is then purged with nitrogen to expel moisture and reactive gases from the interior of the second vessel (90). The cart (5) containing the integrated circuit substrate is then transported to the next manufacturing area. Integrated circuits and other articles may be manufacturing using the cart system of the present invention.

Claims

48 · 3 independent · depth 3

48 granted claims

›1.independentA cart for transporting an article in a manufacturing environment, comprising: a first vessel, the first vessel having a first seal for sealing a door…+17

›2.↳ 1The cart of claim 1, wherein the second vessel is further characterized as having a means for aligning the first vessel within the second vessel.d2+1

›4.↳ 1The cart of claim 1, wherein the second ambient control system comprises a gas cylinder mounted to the second vessel for maintaining a pressure within…d2

›5.↳ 1The cart of claim 1, wherein the second ambient control system further comprises a filter for filtering the second gas.d2

›6.↳ 1The cart of claim 1, wherein the second ambient control system further comprises an ionization means for ionizing the second gas.d2

›7.↳ 1The cart of claim 1, wherein the second ambient control system further comprises a pressure sensor for sensing a pressure within the second vessel.d2

›8.↳ 1The cart of claim 1, wherein the first ambient control system further comprises a filter for filtering the first gas.d2

›9.↳ 1The cart of claim 1, wherein the first ambient control system further comprises an ionization means for ionizing the first gas.d2

›10.↳ 1The cart of claim 1, wherein the first ambient control system further comprises a pressure sensor for sensing a pressure within the first vessel.d2

›11.↳ 1The cart of claim 1, wherein the first ambient control system further comprises a pressure regulator coupled to the purge control valve, wherein gas c…d2

›12.↳ 1The cart of claim 1, wherein the second ambient control system further comprises a pressure regulator coupled to the purge control valve, wherein gas …d2

›13.↳ 1The cart of claim 1, wherein the first ambient control system further comprises a pressure sensor and an inlet control valve for controlling flow of t…d2

›14.↳ 1The cart of claim 1, wherein the second ambient control system further comprises a pressure sensor and an inlet control valve for controlling flow of …d2

›15.↳ 1The cart of claim 1, wherein the first vessel is further characterized as having wheels.d2

›16.↳ 1The cart of claim 1, wherein the second vessel is further characterized as having wheels.d2

›17.↳ 1The cart of claim 1, wherein the first seal is further characterized as a first gasket.d2

›18.↳ 1The cart of claim 1, wherein the second seal is further characterized as a second gasket.d2

›19.independentA method of transporting an article in a manufacturing environment, comprising the steps of: providing a first vessel, the first vessel having a first…+13

›20.↳ 19The method of claim 19, wherein the step of purging the first vessel with the first gas is further characterized as purging the first vessel with an i…d2

›21.↳ 19The method of claim 19, wherein the step of purging the first vessel with the first gas is further characterized as purging the first vessel with nitr…d2

›22.↳ 19The method of claim 19, wherein the step of purging the first vessel with the first gas is further characterized as purging the first vessel with ioni…d2

›23.↳ 19The method of claim 19, further comprising the step of pressurizing the first vessel with the first gas.d2

›24.↳ 19The method of claim 19, wherein the step of purging the second vessel with the second gas is further characterized as purging the second vessel with a…d2

›25.↳ 19The method of claim 19, wherein the step of purging the second vessel with the second gas is further characterized as purging the second vessel with n…d2

›26.↳ 19The method of claim 19, wherein the step of purging the second vessel with the second gas is further characterized as purging the second vessel with i…d2

›27.↳ 19The method of claim 19, further comprising the step of pressurizing the second vessel with the second gas.d2

›28.↳ 19The method of claim 19, wherein the step of placing the article within the first vessel is further characterized as placing an integrated circuit subs…d2

›29.↳ 19The method of claim 19, wherein the step of placing the article within the first vessel is further characterized as placing a substrate for a disk dri…d2

›30.↳ 19The method of claim 19, wherein the step of placing the article within the first vessel is further characterized as placing a packaged integrated circ…d2

›31.↳ 19The method of claim 19, wherein the first seal is further characterized as a first gasket.d2

›32.↳ 19The method of claim 19, wherein the second seal is further characterized as a second gasket.d2

›33.independentA method, comprising the steps of: providing a first vessel, the first vessel having a first seal and a door at a first location; placing an article t…+15

›34.↳ 33The method of claim 33, wherein the step of purging the first vessel with the first gas is further characterized as purging the first vessel with an i…d2

›35.↳ 33The method of claim 33, wherein the step of purging the first vessel with the first gas is further characterized as purging the first vessel with nitr…d2

›36.↳ 33The method of claim 33, wherein the step of purging the first vessel with the first gas is further characterized as purging the first vessel with ioni…d2

›37.↳ 33The method of claim 33, further comprising the step of pressurizing the first vessel with the first gas.d2

›38.↳ 33The method of claim 33, wherein the step of purging the second vessel with the second gas is further characterized as purging the second vessel with a…d2

›39.↳ 33The method of claim 33, wherein the step of purging the second vessel with the second gas is further characterized as purging the second vessel with n…d2

›40.↳ 33The method of claim 33, wherein the step of purging the second vessel with the second gas is further characterized as purging the second vessel with i…d2

›41.↳ 33The method of claim 33, further comprising the step of pressurizing the second vessel with the second gas.d2

›42.↳ 33The method of claim 33, wherein the step of placing the article within the first vessel is further characterized as placing an integrated circuit subs…d2

›43.↳ 33The method of claim 33, wherein the step of placing the article within the first vessel is further characterized as placing a substrate for a disk dri…d2

›44.↳ 33The method of claim 33, wherein the step of placing the article within the first vessel is further characterized as placing a packaged integrated circ…d2

›45.↳ 33The method of claim 33, wherein the first seal is further characterized as a first gasket.d2

›46.↳ 33The method of claim 33, wherein the second seal is further characterized as a second gasket.d2

›47.↳ 33The method of claim 33, wherein the article is selected from the group consisting of an integrated circuit, computer hard disk, liquid crystal display…d2

›48.↳ 33The method of claim 33, wherein the steps are repeated a plurality of times, wherein the article is manufactured, wherein the manufacturing is conduct…d2

Classifications

7 codes

USPC · US Patent Classification

344/2344/17340/72344/67438/14344/10342/10

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Examiner

Stephen Gravini

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