USPatentGranted

Temperature control apparatus with recirculated coolant

Granted 13 Jan 1998 · no office action yet

Assignee: FSI International, Inc.

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Inventors: William G. Reed, Ben J. Sloan · Examiner: John K. Ford

Application
184681
filed 21 Jan 1994
Publication
Not published
not published
Patent· this page
US 5,706,890
granted 13 Jan 1998

Life of the patent

2 dated events
⤢ drag to zoomJan 1994Jul 1994Jan 1995Jul 1995Jan 1996Jul 1996Jan 1997Jul 1997Jan 1998Prosecution
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Abstract

A temperature control and process for adjusting the temperature of a workstation and a work medium at a workstation to a predetermined temperature. The temperature control comprises a cooling vehicle such as a heat exchanger, a coolant temperature sensor and control, a source of fluid coolant such as a manifold, a recirculating pump, a flow line to circulate the coolant to the workstation with the flow line containing a flow regulator and a heater, a bypass valve for bypassing the flow regulator and heater, and a workstation temperature sensor and control. The workstation temperature control controls the operation of the heater and bypass valve so that the temperature of the coolant is below the desired temperature for the workstation, thus achieving a rapid transient response while avoiding overcooling. The coolant temperature control and workstation temperature control may be in a temperature control computer, thus providing a large number of different operating sequences. A number of embodiments of workstations are also described.

Claims

15 · 4 independent · depth 2
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15 granted claims

Classifications

6 codes
USPC · US Patent Classification
165/206165/64165/61165/264165/290165/80.4

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Pendency
4.0 y
1,453 days filing → grant
Office actions
0
on the grant's record
Examiner
John K. Ford
art unit —
Citations: 16 back · 5 forward

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