Semiconductor detection apparatus for detecting nuclear radiation
Granted 9 Aug 1994 · no office action yet
Assignee: Hitachi, Ltd.
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Inventors: Hiroshi Kitaguchi, Shigeru Izumi · Examiner: Carolyn E. Fields
Life of the patent
3 dated eventsAbstract
A high sensitivity semiconductor radiation detector and semiconductor radiation detection apparatus having pn junctions formed in surfaces of at least one semiconductor wafer. A common electrode for the pn junctions may be formed in substrate regions of the semiconductor wafers, and a variable reverse bias voltage may be supplied to at least one electrode formed in contact with a pair of pn junctions. The variable reverse bias means adjusts depletion region thickness(es) so that the detector can detect and distinguish different kinds of nuclear radiation by differing energy levels.
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