A total reflection X-ray fluorescence apparatus comprising: a base material having an optically flat surface for totally reflecting X-rays radiated thereonto at a given glancing angle; monochromator means for monochromatizing X-rays radiated from an X-ray source and radiating monochromatized X-rays onto said optically flat surface at said given glancing angle; first detection means for detecting fluorescent X-rays emerging from a specimen located near the optically flat surface of said base material; and second detection means for detecting an intensity of X-rays reflected from said base material.
›2.↳ 1An apparatus according to claim 1, wherein said first detection means comprise a semiconductor X-ray detector.d2
An apparatus according to claim 1, wherein said first detection means comprise a semiconductor X-ray detector.
›3.↳ 1An apparatus according to claim 1, wherein said second detection means comprise a scintillation counter.d2
An apparatus according to claim 1, wherein said second detection means comprise a scintillation counter.
›4.↳ 1An apparatus according to claim 1, wherein said monochromator means use a diamond type crystal body, and the X-rays radiated from said X-ray source ar…d2
An apparatus according to claim 1, wherein said monochromator means use a diamond type crystal body, and the X-rays radiated from said X-ray source are reflected by a crystal surface thereof.
›5.↳ 1An apparatus according to claim 1, wherein said X-ray source comprises a rotating anode type X-ray source.d2
An apparatus according to claim 1, wherein said X-ray source comprises a rotating anode type X-ray source.
›6.↳ 1An apparatus according to claim 1, wherein said monochromator means use a crystal of lithium fluoride (LiF), and the X-rays radiated from said X-ray s…d2
An apparatus according to claim 1, wherein said monochromator means use a crystal of lithium fluoride (LiF), and the X-rays radiated from said X-ray source are reflected by the crystal surface thereof.
›7.↳ 1An apparatus according to claim 1, wherein said monochromator means use a crystal of ethylenediamine ditartarate (EDDT), and the X-rays radiated from …d2+1
An apparatus according to claim 1, wherein said monochromator means use a crystal of ethylenediamine ditartarate (EDDT), and the X-rays radiated from said X-ray source are reflected by the crystal surface thereof.
›15.↳ 7An apparatus according to claim 7, wherein said monochromator means use a diamond type crystal body, and the X-rays radiated from said X-ray source ar…d3
An apparatus according to claim 7, wherein said monochromator means use a diamond type crystal body, and the X-rays radiated from said X-ray source are reflected by a crystal surface thereof.
›8.↳ 1An apparatus according to claim 1, wherein said monochromator means use a crystal of pentaerylthritol (PET), and the X-rays radiated from said X-ray s…d2
An apparatus according to claim 1, wherein said monochromator means use a crystal of pentaerylthritol (PET), and the X-rays radiated from said X-ray source are reflected by the crystal surface thereof.
›9.↳ 1An apparatus according to claim 1, further comprising a support means for supporting said monochromator means and for changing a fixing angle of said …d2
An apparatus according to claim 1, further comprising a support means for supporting said monochromator means and for changing a fixing angle of said monochromator means so as to radiate said X-rays onto said base material in any wavelength range after monochromatization thereof.
›10.↳ 1An apparatus according to claim 1, wherein said monochromator means radiate monochrome X-rays having a higher energy than that of an X-ray absorption …d2
An apparatus according to claim 1, wherein said monochromator means radiate monochrome X-rays having a higher energy than that of an X-ray absorption spectrum of an element to be detected from said specimen onto the optically flat surface.
›11.↳ 1An apparatus according to claim 1, wherein said X-ray source uses tungsten, and said monochromator means use a crystal of lithium fluoride (LiF).d2
An apparatus according to claim 1, wherein said X-ray source uses tungsten, and said monochromator means use a crystal of lithium fluoride (LiF).
›12.↳ 1An apparatus according to claim 1, further comprising positioning means for setting coordinates on the optically flat surface and positioning said mon…d2
An apparatus according to claim 1, further comprising positioning means for setting coordinates on the optically flat surface and positioning said monochromator means.
